ci801kit

ci801kit

兩相混合式步進電機步距角一般為 1.8°、0.9°，五相混合式步進電機步距角一般為0.72 °、0.36°。也有一些的步進電機通過細分后步距角更小。如三洋公司（SANYO DENKI）生產的二相混合式步進電機其步距角可通過撥碼開關設置為1.8°、0.9°、0.72°、0.36°、0.18°、0.09°、0.072°、0.036°，兼容了兩相和五相混合式步進電機的步距角。

交流伺服電機的控制精度由電機軸后端的旋轉編碼器保證。以三洋全數字式交流伺服電機為例，對于帶標準2000線編碼器的電機而言，由于驅動器內部采用了四倍頻技術，其脈沖當量為360°/8000=0.045°。對于帶17位編碼器的電機而言，驅動器每接收131072個脈沖電機轉一圈，即其脈沖當量為360°/131072=0.0027466°，是步距角為1.8°的步進電機的脈沖當量的1/655。

步進電機在低速時易出現低頻振動現象。振動頻率與負載情況和驅動器性能有關，一般認為振動頻率為電機空載起跳頻率的一半。這種由步進電機的工作原理所決定的低頻振動現象對于機器的正常運轉非常不利。當步進電機工作在低速時，一般應采用阻尼技術來克服低頻振動現象，比如在電機上加阻尼器，或驅動器上采用細分技術等。

交流伺服電機運轉非常平穩，即使在低速時也不會出現振動現象。交流伺服系統具有共振抑制功能，可涵蓋機械的剛性不足，并且系統內部具有頻率解析機能（FFT），可檢測出機械的共振點，便于系統調整。

KLA-Tencor AMS Assembly 720-4800036-002 Used

KLA-Tencor X-Scanner Assembly 760-032324-00 

KLA Tencor PSF driver 0031663-000

KLA-Tencor RS100 Equipe Robot End Effector working

KLA-Tencor 64060 Distribution Module working

KLA-Tencor 301 I-Line RF Bench 740-323100-002 untested

KLA-Tencor SLX Telescope Turret 740-333024-001 untested

KLA-Tencor Quantox Distribution Module 64060 working

KLA-Tencor Optics RF Bench Assy. 740-058089-00 untested

KLA-Tencor 0092173-001 Hamamtsu L9519-01 D2 HB Lamp 

KLA-Tencor AIT Laser Servo Detector Assy. 0099586-000

KLA-Tencor AIT 2 Tropel Lens Assy. 142851 working

KLA-Tencor 710-680279-00 Optics Interface Board 

KLA-Tencor AIT1 Tropel 11.25X Anamorphic Telescope

KLA-Tencor AIT2 UI Splitter Board 547247 Working

KLA-Tencor 285293 386065 AIT2 GPIO Board Working

KLA-Tencor AIT2 XP Datapackage Board 0048805-002 

KLA-Tencor AIT2 4-Channel PWM Motor Drive Board 188859

KLA-Tencor AIT1 Ultrapointe Page Scanner Controller PCB

KLA-Tencor SLX Relay/M5 Assembly 760-333019-001 Used

KLA-Tencor 5300 AMS Assy 720-480036-002 Used, Untested

KLA-Tencor 3XX-1 Image Rotator 760-321260-000 

KLA-Tencor SP1 TBI Ellipsoid Collector 393541 

KLA-Tencor NGP, SP2 Mask Changer Assembly 0053106-002

KLA-Tencor AIT UV Laser Servo Detector 0099586-001 Used

KLA-Tencor Programmable Assembly 20009243A

KLA-Tencor F5 Flipper Actuator 52-0837 

KLA-Tencor M1 3XX-I Active Mirror 760-321700-001 

KLA Tencor 250864

KLA Tencor Extender Card 710-711345-00

KLA TENCOR AUTOFOCUS COLLIMATING LENS 2135/ 2132 LOADER

KLA-Tencor CRS1010 0031469-000 CRS SYSTEMS COMPUTER

KLA Tencor PZT controller 710-404582-00

Daihen KLA-Tencor HRP-340 Auto Tune Box CMC-10

KLA-Tencor 3XX-I Refl. Light Detect.760-321399-000 Used

KLA-Tencor SLX UCO, COL Assembly 760-333305-000 Used

KLA-Tencor Comet AMS Low Mag 0104920-003 Refurbished

KLA-Tencor 3XX-Blue Cas Replacement 780-372161-000 Used

KLA-Tencor Housekeeping Control 0075164-002 working

KLA-Tencor CRS1010 SDP Frame Grabber PCB 000483

KLA-Tencor HRP-340 Techsol Filter Unit 009-99FFU

KLA-Tencor SLX Reflected Light Assy 760-333022-000 Used

KLA-Tencor 5200 Dual Aperture Assy 720-470028-00 Used

KLA-Tencor Mark II Right Top Plate 740-680567-000 

KLA-Tencor SM300 Monochromator 58-0834

KLA-Tencor Nikon Box Door Opener 750-059211-001 

KLA-Tencor Dalton TDI Inspection Camera 750-061019-00

KLA-Tencor MGF2 Analyzer Assembly 0045755-000

KLA TENCOR 220V 37A BLOWER SINGLE PHASE 60HZ

KLA Tencor assy M1/M2 SERVO SP1 UV

KLA-Tencor 760-031790-00 Detector unit ,

KLA-TENCOR SFLEX2 MOTHER BOARD ASSY W/DAUGHTER BOARD ,

KLA Tencor 2131 2132 2552 Defect Wafer Inspection Sys

KLA-Tencor Surfscan 6200 Wafer Surface Analysis System

KLA TENCOR 2131 WAFER DEFECT INSPECTION SYSTEM

Wyko Veeco NT2000 Optical Profiler Zygo KLA Tencor

KLA-Tencor Prometrix FT-750 Film Thickness Measurement

KLA-Tencor Prometrix FT-750 Film Thickness Measurement

KLA-Tencor CRS 3000 300MM COMPLETE SYSTEM

KLA Tencor Ultrapointe Laser Imaging System LIS-1010

KLA Tencor Surfscan 4500 

KLA-Tencor Prometrix FT-600 Film Thickness Measurement

Automated in-line film thickness mapping system w/ C2C

KLA-Tencor AIT 2 Upper Opto-Mech NNC 0024755-001

KLA-Tencor AIT 2 Rear Collector Assy. 0032129-000

KLA-Tencor AIT 2 Front Collector Assy. 0032131-001

KLA-Tencor AIT2 AIT3 Rear Collector Assy. 562556

KLA-Tencor ES4G Calibration Wafer Set

KLA-Tencor AIT 2 Measurement Head 0021726-001 working

KLA Tencor 2135 CMP Wafer Inspection Robot Loader Assy

KLA-Tencor AIT 2 Optics Module 0099610-000 untested

KLA-Tencor 2139 Software v5.3.49 Standard 0027325-000

KLA TENCOR DIGITAL DEFLECTION GENERATOR 701-603180-003

KLA - Tencor KIT , 190 ANALYZER FRU II 0145772-000

PRI KLA-Tencor Robot Track TRA035-LPS working

KLA-Tencor AIT1 JDS Uniphase Laser 2213-75TSLKTB

KLA-Tencor AIT 2 3 Front Collector Assy. 562610

KLA-Tencor AIT 1 JDS Uniphase Laser 2214-20SLUP

KLA-Tencor Alpha-Step 100 Profiler and Printer

KLA-Tencor Quantox 64000 Cooling Module working

KLA-Tencor Quantox 64000 Cooling Module working

KLA-Tencor AIT2 CPM Power Assembly 0218541-000

KLA-Tencor 2139 Sony DXC-9000 Camera 740-772299-000 Kit

KLA-Tencor 2135 Vertical Illuminator 760-663761-001 

KLA-Tencor 2135 to 2138 Upgrade Kit 780-696341-000

KLA-Tencor 2138 Motorized 200mm Retrofit 780-666008-000

KLA - Tencor eS35 IA Board PN: 0134014-002 

KLA-TENCOR 0111816-000 MCP10-DPRC CARD MERCURY COMPUTER

KLA-Tencor NEAT CRS1010 200mm Wafer Stage Controller

KLA-Tencor SLX MAC Box Assy. 770-336660-001 untested

KLA-Tencor AIT1 Leica Microscope Turret Assembly

KLA-Tencor AIT Lens Module 0034691-000 working

KLA-Tencor AIT2 Timing Generator Board 0053946-000 AA

KLA-Tencor AIT2 Wafer APS3.1 Board 0016302-000 AB

KLA-Tencor AIT1 Robot Distr. Assy. PCB 530352 Working

KLA-Tencor AIT1 Olympus Microscope Assembly Working

KLA Tencor Camera Timer 710-714647-00

KLA TENCOR IMAGE DATA STORAGE SYSTEM 710-612545-004/AA

KLA/Tencor/Tokyo Electron VIP Card Board TEL

KLA TENCOR SERVO AMPLIFIER 0061657-001

Aerotech KLA-Tencor Aerotech DR 500 Controller 510432

Aerotech KLA-Tencor AIT 2 DR 500 Controller 510432

KLA-Tencor AIT 2 Timing Generator Board 0053946-000

KLA-Tencor AIT 2 MMD Analog Board 565040 working

KLA-Tencor AIT 2 MMD Analog Board 565040 working

KLA-Tencor SLX RF Bench Assy. 740-336864-001 working

KLA-Tencor 301 I-Line RF Bench 740-323100-002 working

KLA-Tencor Quantox Light Board Module 64040 working

KLA-Tencor AIT 2 AOD GPIO Assy. 0017499-000 working

KLA-Tencor TMC STACIS 2000 Active Vibration Control

KLA-Tencor AIT2 Heat Exhaust Blower 570-0443

KLA-Tencor Cobra Shipping Filter Assy 0107339-000 Used